Electronics & Semiconductor
Ultra-clean air for precision processes
Oil-free compressed air supporting cleanroom and high-purity production environments
Challenges in Electronics & Semiconductor
Semiconductor and electronics manufacturing demand extremely pure, stable compressed air. Even the smallest contamination can lead to defects, rejected batches, or product recalls. Cleanrooms require Class 0 oil-free air for critical processes like wafer handling, lithography, and packaging. At the same time, compressed air must be delivered with constant pressure and flow to support automation systems and tools. Downtime is not an option, and energy efficiency is essential in high-cost, high-precision environments.
Our Solutions
DSP Series
The DSP Series provides reliable Class 0 oil-free air for cleanrooms and critical electronics production. With precision-engineered rotors, industry-leading efficiency, and advanced inverter controls, DSP units deliver stable performance and air purity that meets the strictest standards. Ideal for wafer fab, PCB, and chip assembly environments.


DS Series
Designed for ultra-clean, low-noise environments, the DS Series delivers 100% oil-free air with minimal vibration—perfect for lab-grade applications or point-of-use support in semiconductor fabs. Compact and energy-efficient, DS units are easy to install and maintain, with reliability that meets the demands of 24/7 production.
Related Hitachi Solutions
Tagged air-electronics